Modeling of the electron field emission process in polycrystalline diamond and diamond-like carbon thin films

Electron field emission has been observed from carbon thin films at relatively low electric fields. These films range from amorphous carbon to polycrystalline diamond films. There are many models that attempt to account for the electron field emission process observed in these films. The initial models that were based on the emission due purely to a negative electron affinity have now been modified. The emission from diamond like carbon ~DLC! films, although following a Fowler– Nordheim type curve, do not give realistic values for the emission areas or barriers purely based on a tunneling mechanism. Therefore, a model based on space charge band bending at the back junction is proposed to account for the electron emission at low electric fields from DLC. In this ‘‘space charge interlayer’’ model the real cathode is the substrate, from which hot electrons are created due to the fully depleted DLC film the electrons encounter before reaching the front surface of the film. In this article we extend the model to incorporate the emission of electrons from polycrystalline diamond thin films. © 1999 American Vacuum Society. @S0734-211X~99!10802-3#